In development

Predict etch rates.
With confidence.

A probabilistic etch rate predictor for semiconductor researchers and process engineers. Every result is interval-based, source-cited, and uncertainty-quantified.

What we are building
Phase 1
Silicon and dielectrics Si, SiO₂, Si₃N₄

The foundation of semiconductor wet processing. Isotropic and anisotropic etch in KOH, TMAH, HF and BHF-based systems. Orientation and doping dependence for silicon. Selectivity pairs for all three material combinations.

Phase 2
High-k dielectrics and safety integration Al₂O₃, HfO₂

ALD and sputtered high-k oxides in dilute HF, BHF, H₃PO₄ and SC-1 systems. Integrated GHS hazard information for all supported etchants, sourced from PubChem. Step-by-step preparation guidance with correct addition order and PPE requirements.

Phase 3
Transition metals Ti, Al, Cr, Au, Ni

Thin film metallization layers common in MEMS, packaging and interconnect fabrication. Etch rates in standard metal etchants, H₃PO₄:HNO₃:CH₃COOH blends, peroxide and fluoride-based systems. Selectivity relative to underlying dielectrics and silicon.

Phase 4
III/V semiconductors and refractory metals GaAs, InP, GaN, W, Pt

Compound semiconductors for photonics, RF and power devices. Photo-assisted etch detection for GaAs, InP and GaN: light exposure can increase etch rates 5 to 50 times and is flagged explicitly. Refractory metals for gate and diffusion barrier layers.

Phase 5
Advanced materials SiC, Cu, AlGaAs, InGaAs, ITO, resists

Wide-bandgap semiconductors, diffusion barriers, quaternary III/V alloys, transparent conductive oxides and polymer resists. Completes the full wet-etch material stack encountered in compound semiconductor and advanced MEMS processes.

What to expect
Probabilistic output

Min/expected/max intervals with confidence scores, derived from multiple literature sources.

DOI-linked sources

Every value traces back to peer-reviewed literature. No black-box numbers.

Selectivity network

Etch selectivity between material pairs, directly from the same literature database.

Safety data

GHS hazard information and preparation guidance for common wet etchants.

Get notified at launch

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